target	material	shape
above 1	Ti	50 µm * 500 µm
below 1	Ti	50 µm * 500 µm
inner 1	Ti	50 µm * 500 µm
outer 1	Ti	50 µm * 500 µm
above 2	Al	50 µm * 500 µm
below 2	W	50 µm * 500 µm
inner 2	C	100 µm * 1000 µm
outer 2	Ti	round with diameter 50 µm