target | material | shape |
above 1 | Al | ribbon 50 µm * 500 µm |
below 1 | C | ribbon 100 µm * 500 µm |
inner 1 | W | round with 50 µm diameter |
outer 1 | Ti | round with 50 µm diameter |
above 2 | Pd | round with 50 µm diameter |
below 2 | Ti | round with 50 µm diameter |
inner 2 | C | ribbon 100 µm * 500 µm |
outer 2 | C | ribbon 100 µm * 500 µm |