Target Configuration 99b


 
 
target material shape
above 1 Ti 50 µm * 500 µm
below 1 Ti 50 µm * 500 µm
inner 1 Ti 50 µm * 500 µm
outer 1 Ti 50 µm * 500 µm
above 2 Al 50 µm * 500 µm
below 2 W 50 µm * 500 µm
inner 2 C 50 µm * 1000 µm
outer 2 Ti round with diameter 125 µm